Focused Ion Beam Microscopy and MicromachiningThis introductory article covers the basic FIB instrument and the fundamentals of ion–solid interactions, the resulting capabilities of FIBs. Four areas of application are discussed including transmission electron microscope preparation and sample imaging.
Focused Ion Beam Systems and Dualbeam SystemsA section on focussed ion beam instruments is included in the FEI booklet "An Introduction to Electron Microscopy". The booklet is an excellent overview of of electron microscopy and nanotechnology for students and teachers. It is available as a pdf for download.
FIB (Focused Ion Beam) Tutorials
Helium Ion MicroscopeThe helium ion microscope produces a sub-nanometer size probe with a low mass ion that is extremely bright. This articles provides examples of how the helium ion microscope can provide surface details that are are lost using an SEM.
From: Carl Zeiss Microscopy, Peabody Office
Carl Zeiss Microscopy, Peabody Office
Authors: L. Scipioni*, L. A. Stern, J. Notte, S. Sijbrandij, and B. Griffin
Citation: ADVANCED MATERIALS & PROCESSES
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