Technical Overviews
Focused Ion Beam Microscopy and Micromachining
This introductory article covers the basic FIB instrument and the fundamentals of ion–solid interactions, the resulting capabilities of FIBs. Four areas of application are discussed including transmission electron microscope preparation and sample imaging.
From: FEI Company
FEI Company
Authors: C.A.Volkert and A.M. Minor, Guest Editors, MRS Bulletin, Vol 32, May 2007
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Focused Ion Beam Systems and Dualbeam Systems
A section on focussed ion beam instruments is included in the FEI booklet "An Introduction to Electron Microscopy". The booklet is an excellent overview of of electron microscopy and nanotechnology for students and teachers. It is available as a pdf for download.
From: FEI Company
FEI Company
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FIB (Focused Ion Beam) Tutorials
Helium Ion Microscope
The helium ion microscope produces a sub-nanometer size probe with a low mass ion that is extremely bright. This articles provides examples of how the helium ion microscope can provide surface details that are are lost using an SEM.
From: Carl Zeiss Microscopy, Peabody Office
Carl Zeiss Microscopy, Peabody Office
Authors: L. Scipioni*, L. A. Stern, J. Notte, S. Sijbrandij, and B. Griffin
Citation: ADVANCED MATERIALS & PROCESSES
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