Does Your SEM Really Tell the Truth? - How would you know? Part 1

Michael T. Postek; Andras Vladar; , Three-Dimensional Nanometer Metrology, Engineering Physics Division, NIST Physical Measurement Laboratory (PML)

Understanding how image aquisition and instrument calibration is essential when making measurements using a high resolution scanning electron microscope. As the resolution of scanning electron microscope has increased it is essential to understand the factors that can contribute to potenial measurement errors. This well written article is highly recomended for those using SEM imaging for quantification of specimen features. Part 1 is avaialble for free download fron the NIST. Part 2 covering specimen contamination and methods of contamination elimination and part 3 covering contamination are only available for purchase.